Masterpiece Presents Miniaturized Placement Engine System for Scalable, Identical E/O Wafer-Stage Have a look at

Identical piezo aligners with hover elevation sensing units allow faster picture wafer ironing out.

San Francisco, CA – MASTERPIECE (Physik Instrumente) released an unusual capabilities system for electro-optical wafer-stage ironing out created to confirm electric and optical tool features simultaneously in high-quantity production. The setup integrates high-density electric penetrating with digital photonic placement in a small design built for ATE compatibility.

Identical miniaturized piezoelectric placement engines with hover-height sensing units allow faster picture wafer ironing out.

Identical Procedure and Scalability

Developed for producing range, the system sustains identical procedure of several miniaturized placement engines at some degree of a solitary wafer, allowing synchronised electro-optical penetrating at several have a look at web sites to develop larger throughput and lower fee of have a look at. Its small, ATE-neatly fit design is meant to develop it life like to release numerous aligners in a solitary arrangement– offering to legendary manufacturers change from consecutive, lab-style placement to high-quantity, repeatable wafer-stage ironing out.

An essential uncommon attribute is FAU varying, an interferometry-primarily based primarily primarily hover-height dimension tool that utilizes benefit fiber networks– including no added equipment and no added impact– to determine fiber-to-wafer range at the degree of passion, sustaining stable penetrating and repeatable optical combining. Masterpiece notes that FAU varying would potentially perchance well likewise furthermore allow future methods such as trench-primarily based primarily primarily photonic side combining, offering to establish wafer accurate home and cut tool prices.

” With FAU varying, we lead the design for trench-primarily based primarily primarily photonic side combining, conserving wafer accurate home, lowering tool prices, and opening uncommon kind flexibility for legendary manufacturers.” Dr. Markus Simon, Strategic Technology and Experience Administration at Masterpiece.

masterpiece will certainly discover the system at SPIE Photonics West 2026.

Industries Offered

Photonics, electro-optical wafer ironing out

Included Item

MVTec MERLIC 5.8

MVTec MERLIC 5.8

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