A study group has actually efficiently created a brand-new make-up and handling innovation for clear plasma-resistant high-entropy porcelains. This development is the very first of its kind worldwide and is developed to expand the life-span of interior elements in semiconductor etching tools while minimizing contamination bits throughout the semiconductor production procedure. The research is released in the Journal of Advanced Ceramics.
发布者：Dr.Durant，转转请注明出处：https://robotalks.cn/novel-transparent-ceramics-extend-life-of-semiconductor-etching-equipment/
